Nano Science and Technology Institute
Nanotech 2008 Vol. 1
Nanotech 2008 Vol. 1
Nanotechnology 2008: Materials, Fabrication, Particles, and Characterization - Technical Proceedings of the 2008 NSTI Nanotechnology Conference and Trade Show, Volume 1
Chapter 4: Nanofabrication & Direct-Write Nanolithography

Micropatterning Layers by Flame Aerosol Deposition - Annealing

Authors:A. Tricoli, M. Graf, F. Mayer, S. K├╝hne, A. Hierlemann, S.E. Pratsinis
Affilation:PTL, CH
Pages:546 - 547
Keywords:patterning, sintering, nanoparticles, sensors, solid-oxide fuel cells
Abstract:The development of scalable methods, which effectively bind nanoparticles to surfaces and provide precise patterns, is a key step towards the commercial exploitation of the distinctive properties of nanoparticles. In this context, the direct deposition from aerosols is a powerful tool, which extends the downscaling prospective of solid-state devices, relevant in environmental, energy storage, sensor, catalytic and biological applications. Here, the most widely used aerosol technology for the manufacture of materials (e.g. fumed silica, pigmentary titania and carbon blacks), namely the flame aerosol reactor, has been used for direct synthesis, precise deposition, and stabilization of well-defined nanoparticle patterns on microelectronic substrates. The procedure yields gas-sensitive metal-oxide layers that have been micropatterned on integrated-circuitry substrates under close control of synthesis and operation temperatures and conditions. Furthermore, the presented results have much broader implications as they demonstrate a scalable synthesis method of layers with controlled texture, adhesion and cohesion. Such a method will be important in a number of applications including solid-oxide fuel cells, self-cleaning photocatalytic, antireflective, semiconductor, optical and biosensor films to name a few.
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