Nano Science and Technology Institute
Nanotech 2008 Vol. 1
Nanotech 2008 Vol. 1
Nanotechnology 2008: Materials, Fabrication, Particles, and Characterization - Technical Proceedings of the 2008 NSTI Nanotechnology Conference and Trade Show, Volume 1
Chapter 4: Nanofabrication & Direct-Write Nanolithography

PECVD synthesis of Si nano-wires

Authors:I.I. Kravcheko
Affilation:University of Florida, US
Pages:623 - 625
Keywords:Si nano-wires, plasma enhanced deposition
Abstract:Silicon nano-wires 42 nm in diameter and up to 70 micrometer long have been obtained by utilizing a common for an average nano-fabrication facility plasma equipment set that did not require special modifications.
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