Nanotech 2008 Vol. 1
Nanotech 2008 Vol. 1
Nanotechnology 2008: Materials, Fabrication, Particles, and Characterization - Technical Proceedings of the 2008 NSTI Nanotechnology Conference and Trade Show, Volume 1

Nanofabrication & Direct-Write Nanolithography Chapter 4

PECVD synthesis of Si nano-wires

Authors: I.I. Kravcheko

Affilation: University of Florida, United States

Pages: 623 - 625

Keywords: Si nano-wires, plasma enhanced deposition

Abstract:
Silicon nano-wires 42 nm in diameter and up to 70 micrometer long have been obtained by utilizing a common for an average nano-fabrication facility plasma equipment set that did not require special modifications.

PECVD synthesis of Si nano-wires

ISBN: 978-1-4200-8503-7
Pages: 1,118
Hardcopy: $159.95