Nano Science and Technology Institute
Nanotech 2008 Vol. 1
Nanotech 2008 Vol. 1
Nanotechnology 2008: Materials, Fabrication, Particles, and Characterization - Technical Proceedings of the 2008 NSTI Nanotechnology Conference and Trade Show, Volume 1
 
Chapter 3: Nano Surfaces & Interfaces
 

Replication of micro/nano combined structure using micro/nano combined aluminum stamp

Authors:K.J. Cha, T.H. Kwon
Affilation:POSTECH, KR
Pages:491 - 494
Keywords:micro/nano combined structure, pressing, anodic aluminum oxide, hot embossing
Abstract:This paper presents an easy and efficient fabrication method of plastic replicas of micro/nano combined structures using an aluminum stamp with micro/nano combined structures (ASMNCS) on its surface. ASMNCS could be fabricated by two steps: i) the first step is to introduce micro patterns on an electro-polished aluminum plate by pressing it by micro structured stamp; ii) the second one is to form nano dimple array onto the micro structured aluminum plate making use of the anodic aluminum oxide (AAO) technique. Finally the micro/nano combined structure is replicated on the polymer film (PMMA) via hot embossing process using ASMNCS as a mold.
Replication of micro/nano combined structure using micro/nano combined aluminum stampView PDF of paper
ISBN:978-1-4200-8503-7
Pages:1,118
Hardcopy:$159.95
 
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