Replication of micro/nano combined structure using micro/nano combined aluminum stamp

	Nanotech 2008 Vol. 1 Nanotechnology 2008: Materials, Fabrication, Particles, and Characterization - Technical Proceedings of the 2008 NSTI Nanotechnology Conference and Trade Show, Volume 1 Chapter 3: Nano Surfaces & Interfaces
	Replication of micro/nano combined structure using micro/nano combined aluminum stamp
Authors:	K.J. Cha, T.H. Kwon
Affilation:	POSTECH, KR
Pages:	491 - 494
Keywords:	micro/nano combined structure, pressing, anodic aluminum oxide, hot embossing
Abstract:	This paper presents an easy and efficient fabrication method of plastic replicas of micro/nano combined structures using an aluminum stamp with micro/nano combined structures (ASMNCS) on its surface. ASMNCS could be fabricated by two steps: i) the first step is to introduce micro patterns on an electro-polished aluminum plate by pressing it by micro structured stamp; ii) the second one is to form nano dimple array onto the micro structured aluminum plate making use of the anodic aluminum oxide (AAO) technique. Finally the micro/nano combined structure is replicated on the polymer film (PMMA) via hot embossing process using ASMNCS as a mold.
ISBN:	978-1-4200-8503-7
Pages:	1,118
Hardcopy:	$159.95

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