Nanotech 2008 Vol. 1
Nanotech 2008 Vol. 1
Nanotechnology 2008: Materials, Fabrication, Particles, and Characterization - Technical Proceedings of the 2008 NSTI Nanotechnology Conference and Trade Show, Volume 1

Nano Surfaces & Interfaces Chapter 3

Replication of micro/nano combined structure using micro/nano combined aluminum stamp

Authors: K.J. Cha, T.H. Kwon

Affilation: POSTECH, Korea

Pages: 491 - 494

Keywords: micro/nano combined structure, pressing, anodic aluminum oxide, hot embossing

Abstract:
This paper presents an easy and efficient fabrication method of plastic replicas of micro/nano combined structures using an aluminum stamp with micro/nano combined structures (ASMNCS) on its surface. ASMNCS could be fabricated by two steps: i) the first step is to introduce micro patterns on an electro-polished aluminum plate by pressing it by micro structured stamp; ii) the second one is to form nano dimple array onto the micro structured aluminum plate making use of the anodic aluminum oxide (AAO) technique. Finally the micro/nano combined structure is replicated on the polymer film (PMMA) via hot embossing process using ASMNCS as a mold.

Replication of micro/nano combined structure using micro/nano combined aluminum stamp

ISBN: 978-1-4200-8503-7
Pages: 1,118
Hardcopy: $159.95