Authors: R.W. Liptak, X.D. Pi, U. Kortshagen and S.A. Campbell
Affilation: University of Minnesota, United States
Pages: 551 - 554
Keywords: silicon, nanoparticle, passivation, emission
A novel process has been developed to create an aerosol of passivated silicon nanoparticles that emit controlled colors from blue to the near IR. The emission is stable in air. This is the first ever report of a process that can produce the full spectrum of visible light from silicon and the first process that creates air-stable blues, greens, and yellows. The particles are created in a nonthermal silane plasma and the resultant aerosol is sent to a second plasma. The process in this chamber involves simultaneously etching and coating the nanoparticles using a CF4 plasma. The plasma leaves a coating on the surface that prevents the formation of Si=O bonds that are typically seen after air exposure.