Nano Science and Technology Institute
Nanotech 2007 Vol. 4
Nanotech 2007 Vol. 4
Technical Proceedings of the 2007 NSTI Nanotechnology Conference and Trade Show, Volume 4
Chapter 3: Nanofabrication

Fabrication and characterization of Alq3 electrically actuated nanospring arrays

Authors:G.D. Dice and M.J. Brett
Affilation:University of Alberta, CA
Pages:491 - 493
Keywords:GLAD, Alq3, nanospring
Abstract:Glancing Angle Deposition (GLAD) is a single step physical vapour deposition (PVD) technique utilizing oblique deposition angles to create porous thin film helical structures. Previous nanospring work has used inorganic materials such as SiO2. Here, we study an electrically variable Fabry-Perot resonator constructed from the organic material tris (8-hydroxyquinoline) aluminum (Alq3). Electrostatic compression of the nanosprings between the parallel mirrors controls the peak transmission wavelength. The first of three device layers is a 25 nm thick aluminum film deposited to form a partially reflective mirror and one plate of the capacitor structure. A helical Alq3 nanospring film with a pitch of 300 nm is then deposited via GLAD PVD. A final 25 nm thick patterned aluminum film completes the device. A spring deflection of 4 nm is expected at an applied voltage of 10 V for this two turn nanospring structure. The peak transmission wavelength of the device shifts from 528 nm to 526 nm as the applied voltage is raised from 0 V to 10 V. This shift is approximately equal to the expected 3 nm wavelength shift for a nanospring compression of 4 nm. It may be possible to create novel resonant devices with this electrically controllable structure.
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