Nano Science and Technology Institute
Nanotech 2007 Vol. 4
Nanotech 2007 Vol. 4
Technical Proceedings of the 2007 NSTI Nanotechnology Conference and Trade Show, Volume 4
Chapter 3: Nanofabrication

Nanostructuration of sol-gel thin films

Authors:C. Peroz, V. Goletto, M. Foresti, C. Heitz, L. Le Gratiet, E. Barthel and E. Sondergard
Affilation:Laboratoire mixte CNRS/Saint-Gobain, FR
Pages:450 - 452
Keywords:nanoimprint, sol-gel
Abstract:Sol-gel chemistry is very versatile and structuring sol-gel materials will allow a fine tuning of chemistry, electromagnetic, optical and mechanical properties. We explore the possibilities to combine sol-gel chemistry to large scale patterning at low cost and high throughput. We demonstrate here the feasibility to fabricate organic-inorganic silica patterns over large areas with a resolution lower than 500nm by soft thermal nanoimprint lithography.
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