Nanotech 2007 Vol. 4
Nanotech 2007 Vol. 4
Technical Proceedings of the 2007 NSTI Nanotechnology Conference and Trade Show, Volume 4

Nanofabrication Chapter 3

Nanostructuration of sol-gel thin films

Authors: C. Peroz, V. Goletto, M. Foresti, C. Heitz, L. Le Gratiet, E. Barthel and E. Sondergard

Affilation: Laboratoire mixte CNRS/Saint-Gobain, France

Pages: 450 - 452

Keywords: nanoimprint, sol-gel

Abstract:
Sol-gel chemistry is very versatile and structuring sol-gel materials will allow a fine tuning of chemistry, electromagnetic, optical and mechanical properties. We explore the possibilities to combine sol-gel chemistry to large scale patterning at low cost and high throughput. We demonstrate here the feasibility to fabricate organic-inorganic silica patterns over large areas with a resolution lower than 500nm by soft thermal nanoimprint lithography.

Nanostructuration of sol-gel thin films

ISBN: 1-4200-6376-6
Pages: 768
Hardcopy: $139.95