Authors: C. Peroz, V. Goletto, M. Foresti, C. Heitz, L. Le Gratiet, E. Barthel and E. Sondergard
Affilation: Laboratoire mixte CNRS/Saint-Gobain, France
Pages: 450 - 452
Keywords: nanoimprint, sol-gel
Sol-gel chemistry is very versatile and structuring sol-gel materials will allow a fine tuning of chemistry, electromagnetic, optical and mechanical properties. We explore the possibilities to combine sol-gel chemistry to large scale patterning at low cost and high throughput. We demonstrate here the feasibility to fabricate organic-inorganic silica patterns over large areas with a resolution lower than 500nm by soft thermal nanoimprint lithography.