Nano Science and Technology Institute
Nanotech 2007 Vol. 4
Nanotech 2007 Vol. 4
Technical Proceedings of the 2007 NSTI Nanotechnology Conference and Trade Show, Volume 4
Chapter 1: Nanoscale Characterization

The Impact of Advanced S/TEM on Atomic-Scale Characterisation and Analysis

Authors:D.H.W. Hubert, B. Freitag and D.J. Stokes
Affilation:FEI Company, NL
Pages:85 - 88
Keywords:aberration corrector, monochromator, single atoms, sub-angstrom resolution, spectroscopy
Abstract:As the limits of nanotechnology are expanded ever further, so too must we push back the frontiers of imaging and analysis. The need for tools that can deliver new, ultra-high resolution information is driving the development of electron microscopy and spectroscopy to the extremes of performance. For example, aberration-corrected S/TEM gives us the ability to work at sub-angstrom length-scales. This, combined with sharply-defined energy resolution, enables us to acquire information at the single atomic level and gain knowledge of inter-atomic bonding for characterisation of chemical composition, electronic structure and mechanical properties. In addition, there is scope for capturing time-resolved structural transformations with sub-nanometer detail, enabling us to directly observe and understand the dynamics of a range of chemical processes in situ. We discuss the advances that have enabled these technological breakthroughs and demonstrate the potential for new insights in nano-characterisation and analysis.
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