Nano Science and Technology Institute
Nanotech 2007 Vol. 3
Nanotech 2007 Vol. 3
Technical Proceedings of the 2007 NSTI Nanotechnology Conference and Trade Show, Volume 3
Chapter 7: Compact Modeling

Non-standard geometry scaling effects

Authors:M. Schröter and S. Lehmann
Affilation:Technische Universität Dresden, DE
Pages:603 - 608
Keywords:non-standard, geometry scaling, compact model, physics-based
Abstract:The impact of process and geometry effects on important electrical parameters of SiGe HBTs as a function of emitter width is investigated and explained using device and circuit simulations. The goal is to provide a guideline for identifying such effects, especially those causing non-standard geometry scaling, in order to be able to include them in the parameter extraction for geometry scalable physics-based compact models. Simple extensions of the standard scaling law are suggested, which are suitable for compact modeling. Experimental results exhibting some of the effects will be shown as demonstration.
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