Nano Science and Technology Institute
Nanotech 2007 Vol. 3
Nanotech 2007 Vol. 3
Technical Proceedings of the 2007 NSTI Nanotechnology Conference and Trade Show, Volume 3
Chapter 7: Compact Modeling

Analysis of Halo Implanted MOSFETs.

Authors:C.C. McAndrew and P.G. Drennan
Affilation:Freescale Semiconductor, US
Pages:594 - 598
Keywords:MOSFET model, halo implant, analytic model
Abstract:MOSFETs with heavily doped regions at one or both ends of the channel exhibit some quantitative differences in electrical behavior compared to devices with laterally unform channel doping. These can include a peakiness to the transconductance near threshold, asymmetries in capacitance, and a surprising decrease in the statistical variation of the peak gain factor as channel length decreases. Historically accurate modeling of such devices is best done with sectional MOSFET models. Here we present an analytic model of the behavior of the current and transconductance of a (unilaterally or bilaterally) halo implanted MOSFET and show that it predicts the decrease in variation of gain factor with channel length.
Analysis of Halo Implanted MOSFETs.View PDF of paper
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