Authors: M. Feldmann, S. Demming and S. Büttgenbach
Affilation: Institute for Microtechnology, Germany
Pages: 441 - 443
Keywords: micro pump, electro magnetic, PDMS, polymer magnets, micro coils, micro valve, plunger coil actuator
The mergence of partial aspects and functional components of micro actuators and micro fluidic technology allows the development of complex micro systems. This enormous potential is shown in this article by the realization of an electro magnetic micro pump. The basic build-up consists of a polymer magnet integrated into a pump chamber of a fluidic PDMS device, which is located above a double layer micro coil. When applying a current, the polymer magnet performs a bidirectional movement, which results in a pumping effect by the two passive check valves. The valves, which consist of a membrane and lips pressing on a valve seat, can thus completely seal the fluid channel. The fluidic system for this novel micro pump was at first fabricated without the double layer spiral coil and successfully tested. In order to connect the valve seats based on SU-8 with the PDMS fluid chamber and valve lips, a special bonding process was developed. The next step is to combine the fluidic system with the electromagnetic part which is currently under investigation.