Nano Science and Technology Institute
Nanotech 2007 Vol. 3
Nanotech 2007 Vol. 3
Technical Proceedings of the 2007 NSTI Nanotechnology Conference and Trade Show, Volume 3
Chapter 4: Micro and Nano Fluidics

Embeddable Low-Voltage Micropump using Electroosmosis of the Second Kind

Authors:T. Heldal, T. Volden, J. Auerswald and H. Knapp
Affilation:IQ Micro Inc., CH
Pages:268 - 271
Keywords:micropump, electroosmosis of the second kind, EO2, low-voltage, ac, microfabrication
Abstract:A low-voltage micropump with no moving parts and based on standard MEMS fabrication techniques has been developed. High pumping rate is achieved by using electroosmosis of the second kind (EO2). The pump has been characterized by pumping a variety of liquids, including de-ionized water, phosphate buffer saline (PBS), and aqueous solutions of sugars and alcohols, with pumping speeds of hundreds of µm/s. The small power/voltage requirements and dimensions make the pump suitable for portable, embedded and implantable devices. The pump is situated inside the flow channel and can therefore be directly integrated in high-density microfluidic networks.
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