Authors: L. Sheet
Affilation: SEMI, United States
Pages: 241 - 243
Keywords: MEMS, microsystems, MST, micromachine, MEMS equipment, MEMS Materials, DRIE, SOI
The global MEMS market is experiencing strong growth, driven by consumer applications, MEMS-CMOS integration, automotive applications and emerging MEMS device markets. MEMS manufacturing technology and materials are critical to the continued growth in this market. The impact of application trends on the MEMS equipment and materials markets are reviewed and these markets are quantified.