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 | Nanotech 2007 Vol. 3
Technical Proceedings of the 2007 NSTI Nanotechnology Conference and Trade Show, Volume 3
Chapter 3: Sensors & MEMS |
| | Global MEMS Equipment and Materials Markets and Opportunities | | Authors: | L. Sheet | | Affilation: | SEMI, US | | Pages: | 241 - 243 | | Keywords: | MEMS, microsystems, MST, micromachine, MEMS equipment, MEMS Materials, DRIE, SOI | | Abstract: | The global MEMS market is experiencing strong growth, driven by consumer applications, MEMS-CMOS integration, automotive applications and emerging MEMS device markets. MEMS manufacturing technology and materials are critical to the continued growth in this market. The impact of application trends on the MEMS equipment and materials markets are reviewed and these markets are quantified. | | ISBN: | 1-4200-6184-4 |
| Pages: | 732 |
| Hardcopy: | $199.99 |
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