Global MEMS Equipment and Materials Markets and Opportunities

	Nanotech 2007 Vol. 3 Technical Proceedings of the 2007 NSTI Nanotechnology Conference and Trade Show, Volume 3 Chapter 3: Sensors & MEMS
	Global MEMS Equipment and Materials Markets and Opportunities
Authors:	L. Sheet
Affilation:	SEMI, US
Pages:	241 - 243
Keywords:	MEMS, microsystems, MST, micromachine, MEMS equipment, MEMS Materials, DRIE, SOI
Abstract:	The global MEMS market is experiencing strong growth, driven by consumer applications, MEMS-CMOS integration, automotive applications and emerging MEMS device markets. MEMS manufacturing technology and materials are critical to the continued growth in this market. The impact of application trends on the MEMS equipment and materials markets are reviewed and these markets are quantified.
ISBN:	1-4200-6184-4
Pages:	732
Hardcopy:	$139.95

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