| |
 | Nanotech 2007 Vol. 3
Technical Proceedings of the 2007 NSTI Nanotechnology Conference and Trade Show, Volume 3
Chapter 3: Sensors & MEMS |
| | Compact Electromagnetic XY Stage with Nano Scale Resolution and Vibration Resistance | | Authors: | K.I. Lee, S.H. Kim, J.W. Cho, J.K. Shin, J.C. Yoo and Y.J. Choi | | Affilation: | Korea Electronics Technology Institute, KR | | Pages: | 221 - 224 | | Keywords: | electromagnetic actuator, SPM, data storage | | Abstract: | The design, fabrication, and the measurement results of an electromagnetic XY stage are presented. The device has an anti vibration structure and shows a high fill factor of 45% due to its unique structure. Furthermore, the power consumption of the device is very low, which is indispensable for a portable application. The device consists of a top substrate on a flexure holding magnets, a spacer, and a PCB including multilayered coils. The top substrate is forced to move in the opposite direction of the magnets by applying a current in the coil. The flexure are designed to have no net torque around its pivot under an external acceleration, which results in a good vibration resistance. The modal analysis shows that the high order resonance can be placed above 3 kHz by gimbal. The coil is optimized for low power consumption and the FEM analysis shows that an optimal design can suppress a vibration below 10 nm under 1 G acceleration. The stage shows a good linearity and the average power consumption is 60 mW for 68 m x 68 m scanning. The first resonance frequency is 186 Hz, which is lower than expected due to the spring width decrease. | | ISBN: | 1-4200-6184-4 |
| Pages: | 732 |
| Hardcopy: | $199.99 |
|
| Order: | Mail/Fax Form |
| Special: | 3 CD Set — 15% off with Free Shipping |
| Up | |
|
| nanoPRwire™ |
 |
| News Headlines |
 |
|
|
| |
| |
|
| | |
| |
|
|
