Nano Science and Technology Institute
Nanotech 2007 Vol. 3
Nanotech 2007 Vol. 3
Technical Proceedings of the 2007 NSTI Nanotechnology Conference and Trade Show, Volume 3
Chapter 3: Sensors & MEMS

Compact Electromagnetic XY Stage with Nano Scale Resolution and Vibration Resistance

Authors:K.I. Lee, S.H. Kim, J.W. Cho, J.K. Shin, J.C. Yoo and Y.J. Choi
Affilation:Korea Electronics Technology Institute, KR
Pages:221 - 224
Keywords:electromagnetic actuator, SPM, data storage
Abstract:The design, fabrication, and the measurement results of an electromagnetic XY stage are presented. The device has an anti vibration structure and shows a high fill factor of 45% due to its unique structure. Furthermore, the power consumption of the device is very low, which is indispensable for a portable application. The device consists of a top substrate on a flexure holding magnets, a spacer, and a PCB including multilayered coils. The top substrate is forced to move in the opposite direction of the magnets by applying a current in the coil. The flexure are designed to have no net torque around its pivot under an external acceleration, which results in a good vibration resistance. The modal analysis shows that the high order resonance can be placed above 3 kHz by gimbal. The coil is optimized for low power consumption and the FEM analysis shows that an optimal design can suppress a vibration below 10 nm under 1 G acceleration. The stage shows a good linearity and the average power consumption is 60 mW for 68 μm x 68 μm scanning. The first resonance frequency is 186 Hz, which is lower than expected due to the spring width decrease.
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