Huang Y-Y., Yang Y-J
National Taiwan University, TW
Keywords: bi-stable mechanism, snap-through, transient
In this work, we present the study of the transient behaviors of the bi-stable mechanism used for a MEMS optical switch. The major part of the bi-stable mechanism consists of two constrained curved structures (the double-curved beam). As the applied force exceeds a critical value, the double-curved beam snap-through to the other stable state. We use the finite element method (FEM) to simulate both the static and transient snap-through behaviors of the bi-stable mechanism. Also, the simulated results will be compared with the measured results to study the influence of post-snap-through dynamics on the optical performance of the optical switch.
Journal: TechConnect Briefs
Volume: 3, Technical Proceedings of the 2007 NSTI Nanotechnology Conference and Trade Show, Volume 3
Published: May 20, 2007
Pages: 173 - 176
Industry sector: Sensors, MEMS, Electronics
Topic: Sensors - Chemical, Physical & Bio
ISBN: 1-4200-6184-4