Nano Science and Technology Institute
Nanotech 2007 Vol. 3
Nanotech 2007 Vol. 3
Technical Proceedings of the 2007 NSTI Nanotechnology Conference and Trade Show, Volume 3
Chapter 3: Sensors & MEMS

Reduced-order modelling of the Reynolds equation for flexible structures

Authors:A. Missoffe, J. Juillard and D. Aubry
Affilation:SUPELEC, FR
Pages:137 - 140
Keywords:reduced-order modelling, squeeze-film damping, large displacements, modal projection techniques
Abstract:A reduced-order modelling technique for the Reynolds equation - which governs squeeze-film damping in MEMS structures - is presented in this paper. It is valid for flexible structures and large displacements, the only hypothesis made being small pressure variations. In order to obtain this reduced-order model, the Reynolds equation is transformed through a change of variables so that the spatial differential operator no longer depends on time. A reduced-order model of this transformed equation can then be obtained by projection on the eigenmodes of the spatial operator, in this case the Laplacian. This is clearly an advantage compared to other existing methods and results in smaller construction costs.
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