Nano Science and Technology Institute
Nanotech 2007 Vol. 3
Nanotech 2007 Vol. 3
Technical Proceedings of the 2007 NSTI Nanotechnology Conference and Trade Show, Volume 3
Chapter 3: Sensors & MEMS

Spray Pyrolysis Technology for Nanodimensional Film Gas Sensors Manufacturing

Authors:S. Dmitriev, T. Goglidze and I. Dementiev
Affilation:Moldova State University, MD
Pages:128 - 131
Keywords:gas sensor, nanodimensional film, spray pyrolysis
Abstract:Report presents results of investigations aimed spray pyrolysis technology application for nano-dimensional film gas sensors (NDFGS) manufacturing. It is shown that due to spray deposition installation modification the developed technology of nanodimensional gas sensitive film formation becomes compatible with group planar technology of microelectronics. Correct selection of spray solutions has allowed to providing 150-200°C decreasing of deposition temperatures, improving the initial stoichiometry of gas sensitive film composition (post-deposition treatment is excluded and manufacturing cost is reduced) and increasing of gas sensitivity to CO by one order and to hydrogen by three orders. It is concluded that spray pyrolysis technology can be successfully used for NDFGS manufacturing.
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