Nano Science and Technology Institute
Nanotech 2007 Vol. 3
Nanotech 2007 Vol. 3
Technical Proceedings of the 2007 NSTI Nanotechnology Conference and Trade Show, Volume 3
Chapter 2: MEMS/NEMS: Modeling & Characterization

Frequency Domain Modeling of SAW Devices

Authors:W.C. Wilson and G.M. Atkinson
Affilation:NASA Langley Research Center, US
Pages:73 - 76
Keywords:surface acoustic wave, modeling, frequency domain, MEMS
Abstract:The lack of integrated design tools for MEMS devices in general, and for Surface Acoustic Wave (SAW) devices specifically, has led to the development of tools that will enable integrated design, modeling, simulation, analysis and automatic layout generation of SAW devices. First order models of SAW delay lines in the frequency domain have been developed using the Simulink® simulator. The model implements the Impulse Response method to calculate the frequency response, the radiation conductance, the acoustic susceptance, the complex impedance, and the insertion loss for the system.
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