Nanotech 2007 Vol. 3
Nanotech 2007 Vol. 3
Technical Proceedings of the 2007 NSTI Nanotechnology Conference and Trade Show, Volume 3

MEMS/NEMS: Modeling & Characterization Chapter 2

The mechanical stiffness and the size effect of the silicon based nano-structures using molecular dynamic (MD) simulation
C.A. Yuan, O. van der Sluis, G.Q. Zhang, L.J. Ernst, W.D. van Driel and R.B.R. van Silfhout
Delft University of Technology, NL

Investigation of Vector Discretization Schemes for Box Volume Methods
O. Triebl and T. Grasser
Christian Doppler Laboratory for TCAD in Microelectronics, AT

A new compact scalable circuit model for RF MEMS switches
H.M.R. Suy, H.G.A. Huizing, P.G. Steeneken and O.I. Yanson
NXP Semiconductors, NL

New Analysis Method for Coupled-Field Micro Devices
M. Motiee, A. Khajepour and R.R. Mansour
University of Waterloo, CA

Frequency Domain Modeling of SAW Devices
W.C. Wilson and G.M. Atkinson
NASA Langley Research Center, US

Modeling and Dynamics of Coupled Dome-shaped Micromechanical Oscillators
T. Sahai and A.T. Zehnder
Cornell University, US

Optimization of Masks for High Aspect Ration UV-Lithographic Patterning
U. Triltsch and S. Büttgenbach
Technische Universität Braunschweig, DE

A Study on the Electrical Properties of Plasma Nitrided Oxide Gate Dielectric in Flash Memory
M. Park, K. Suh, S. Lee, H. Kang, K. Kim and K. Kim
Samsung Electronics, KR

A Method for Semi-Automated Modeling of Analog-Mixed Signal Systems in Automotive Applications based on Transient Simulation Data
H. Mielenz, R. Doelling and W. Rosenstiel
Robert Bosch Group, DE

Genetic Algorithm for the Design of Microchip Flow Cytometers
H. Bang, W.G. Lee, H. Yun, J.K. Min, C. Chung, J.K. Chang and D.-C. Han
Seoul National University, KR

FEM Simulation for demolding process in thermal imprint lithography
Z. Song, J. Lee and S. Park
Louisiana State University, US

Study of Thermal Efficiency Optimization in a Twin-bubble MEMS Micro-injector
H-K Tang, F-C Tseng, W.W. Wang, I-Y Lee, C-K Lee and K. Lee
BenQ Corporation, TW


ISBN: 1-4200-6184-4
Pages: 732
Hardcopy: $139.95