Nano Science and Technology Institute
Nanotech 2007 Vol. 3
Nanotech 2007 Vol. 3
Technical Proceedings of the 2007 NSTI Nanotechnology Conference and Trade Show, Volume 3
Chapter 1: MEMS/NEMS

Nano-structure or nano-system: opportunities and pitfalls

Authors:P. French
Affilation:Delft University of Technology, NL
Pages:1 - 4
Keywords:scaling, microsystems, smart sensors
Abstract:Scaling down has revealed many new effects leading to new devices able to measure faster and more accurately than traditional devices. They also present challenges in terms of connecting to the macro-world and in reliability. In some cases the scaling works against us leading to lower performance. We should also consider reducing the size of the system, through integration and optimisation. It is therefore important to consider the benefits of miniaturisation for each application and either reduce the size of the structures in the system, or integrate the system to reduce size. This paper discusses the effects of scaling both devices and systems.
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