Nano Science and Technology Institute
Nanotech 2007 Vol. 3
Nanotech 2007 Vol. 3
Technical Proceedings of the 2007 NSTI Nanotechnology Conference and Trade Show, Volume 3
Chapter 1: MEMS/NEMS

Comparison of Piezoelectric MEMS Mechanical Vibration Energy Scavengers

Authors:M. Marzencki, S. Basrour, B. Belgacem, P. Muralt and M. Colin
Affilation:TIMA Laboratory, FR
Pages:21 - 24
Keywords:energy scavenging, piezoelectric MEMS
Abstract:This paper presents a design, modelling, fabrication and experimental test results of MEMS mechanical vibration energy scavenging devices for micro power generation. There is a growing need for such structures in the field of wireless sensor networks, where increasing the autonomy of the node is a crucial issue. In our case, the transduction is performed using the piezoelectric effect and the devices are entirely made using microfabrication techniques. This is a continuation of work already presented that proposes improved devices and use of new materials
Comparison of Piezoelectric MEMS Mechanical Vibration Energy ScavengersView PDF of paper
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