Nano Science and Technology Institute
Nanotech 2007 Vol. 3
Nanotech 2007 Vol. 3
Technical Proceedings of the 2007 NSTI Nanotechnology Conference and Trade Show, Volume 3
Chapter 1: MEMS/NEMS

Piezoresistive effect in DLC Films and Silicon

Authors:A. Tibrewala, A. Phataralaoha, E. Peiner, R. Bandorf and S. BĆ¼ttgenbach
Affilation:TU Braunschweig, DE
Pages:17 - 20
Keywords:DLC, boss membrane, CMM, p-diffused silicon
Abstract:In this work piezoresistive effect in Diamond-like carbon (DLC) films and p-diffused strain gauges is compared for the first time. DLC films are already well known in optical coatings. Here it is integrated with silicon in a MEMS test structure and shows a high gauge factor value which will make DLC films popular in MEMS. p-diffused strain gauges are presented for comparision. Both the materials shows a promise as force sensors which can be used in 3D coordinate measuring machine.
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