Authors: A. Tibrewala, A. Phataralaoha, E. Peiner, R. Bandorf and S. Büttgenbach
Affilation: TU Braunschweig, Germany
Pages: 17 - 20
Keywords: DLC, boss membrane, CMM, p-diffused silicon
In this work piezoresistive effect in Diamond-like carbon (DLC) films and p-diffused strain gauges is compared for the first time. DLC films are already well known in optical coatings. Here it is integrated with silicon in a MEMS test structure and shows a high gauge factor value which will make DLC films popular in MEMS. p-diffused strain gauges are presented for comparision. Both the materials shows a promise as force sensors which can be used in 3D coordinate measuring machine.