Authors: G.P. Nordin, S. Kim, J. Noh and Y. Qian
Affilation: Brigham Young University, United States
Pages: 194 - 197
Keywords: microcantilever sensors, photonic sensors
We have recently introduced a new microcantilever transduction mechanism that is designed to scale to large arrays on a single chip while maintaining a very compact form factor and high sensitivity. It is based on an in-plane photonic approach that uses differential optical detection. In this paper we discuss our new approach and experimental demonstration of its fundamental elements.