Nanotech 2007 Vol. 2
Nanotech 2007 Vol. 2
Technical Proceedings of the 2007 NSTI Nanotechnology Conference and Trade Show, Volume 2

Diagnostics & Assays Chapter 3

In-Plane Transduction of Nanomechanical Microcantilever Motion To Enable Sensor Arrays

Authors: G.P. Nordin, S. Kim, J. Noh and Y. Qian

Affilation: Brigham Young University, United States

Pages: 194 - 197

Keywords: microcantilever sensors, photonic sensors

Abstract:
We have recently introduced a new microcantilever transduction mechanism that is designed to scale to large arrays on a single chip while maintaining a very compact form factor and high sensitivity. It is based on an in-plane photonic approach that uses differential optical detection. In this paper we discuss our new approach and experimental demonstration of its fundamental elements.

In-Plane Transduction of Nanomechanical Microcantilever Motion To Enable Sensor Arrays

ISBN: 1-4200-6183-6
Pages: 838
Hardcopy: $139.95