Nanotech 2007 Vol. 1
Nanotech 2007 Vol. 1
Technical Proceedings of the 2007 NSTI Nanotechnology Conference and Trade Show, Volume 1

Lithography and Patterning Chapter 4

High resolution Nanolithography using Focused Ion Beam Scanning Electron Microscopy (FIB SEM)

Authors: O. Wilhelmi, L Roussel, D.J. Stokes and D.H.W. Hubert

Affilation: FEI Company, Netherlands

Pages: 250 - 253

Keywords: FIB, SEM, nanolithography, nanofabrication, nanoprototyping, high resolution

Abstract:
State-of-the-art FIB technology combined with high-performance SEM is making a big impact on nanotechnology, particularly with the ability to use either focused ions or electrons to perform advanced nanolithography. Achieving the highest standards requires an understanding of the physics and chemistry of the system as a whole, which contains ions and electrons of various energies and origins, substrates with a range of electrical and mechanical properties and reactive gases capable of specific effects on sputtering and re-deposition. We have built up a detailed knowledge of these complex parameters and, accordingly, have developed new strategies, allowing us to generate high resolution nanolithographic structures down to a few nanometers. We will compare and contrast different strategies in order to demonstrate the importance of factors such as single- or multi-pass execution, selection of pitch, choice of beam and time-dependent considerations, amongst others.

High resolution Nanolithography using Focused Ion Beam Scanning Electron Microscopy (FIB SEM)

ISBN: 1-4200-6182-8
Pages: 726
Hardcopy: $139.95