 | Nanotech 2007 Vol. 1
Technical Proceedings of the 2007 NSTI Nanotechnology Conference and Trade Show, Volume 1
Chapter 4: Lithography and Patterning |
| - | Novel lithography technique using an ASML stepper/scanner for the manufacture of display devices in MEMS world |
| | K. Best, P. Raval, N. Kappel, C. Yang, M. Wang, N. Jeewakhan, M. Prejda, K. Kassekert and M. Moore |
| | ASML USA, Inc - Special Applications, US |
| - | High resolution Nanolithography using Focused Ion Beam Scanning Electron Microscopy (FIB SEM) |
| | O. Wilhelmi, L Roussel, D.J. Stokes and D.H.W. Hubert |
| | FEI Company, NL |
| - | Dip Pen Nanolithography®: A Maturing Technology for High-Throughput Flexible Nanopatterning |
| | J.R. Haaheim, E.R. Tevaarwerk, J. Fragala and R. Shile |
| | NanoInk, Inc., US |
| - | Fabrication of Bowtie Nano-Gap Structures by Electron Beam Lithography |
| | R. Murali, E. Walters, F. Zaman, C. Tabor, W. Huang, M. El-Sayed and J.D. Meindl |
| | Georgia Tech, US |
| - | Gas Phase Nanoparticle Integration |
| | C.R. Barry and H.O. Jacobs |
| | University of Minnesota, US |
| - | Silicon Nanowire Transistors Fabricated by the Mass-Manufacturable, Self-Assembling “Grow-in-Place” Approach |
| | Y. Shan and S.J. Fonash |
| | Pennsylvania State University, US |
| - | Electric Field Process for the Fabrication of Higher Order Structures form Biomolecule Derivatized Nanoparticles |
| | M.J. Heller, D. Dehlinger, B. Sullivan and S. Esener |
| | University of California, San Diego, US |
| - | Nanofabrication of Biomaterial, CNT and Organic Polymer Patterned Thinfilms using Piezoelectric Ink Jet Printing |
| | J.L. Sumerel, L.F. Deravi and D.W. Wright |
| | Dimatix, Inc., US |
| - | Direct Parallel Patterning of Multiplex DNA and protein arrays |
| | S. Rozhok, N. Amro, J. Fragala, T. Levesque and M. Nelson |
| | NanoInk, Inc., US |
| - | Thickness-controlled Metal Nanoscale Etch for Proposed Metal Nanowires Fabrication |
| | B.C. Lee, M.H. Kim, H.J. Shin and S. Moon |
| | Korea Institute of Science and Technology, KR |
| ISBN: | 1-4200-6182-8 |
| Pages: | 726 |
| Hardcopy: | $199.99 |
| Special: | 3 CD Set — 15% off with Free Shipping |
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| Order: | Mail/Fax Form |
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