Nanotech 2007 Vol. 1
Nanotech 2007 Vol. 1
Technical Proceedings of the 2007 NSTI Nanotechnology Conference and Trade Show, Volume 1

Carbon Nanotubes Chapter 1

Fabrication of Cu-encapsulated Carbon Nanotube Inductors

Authors: B.C. Lee, J.O. Lee, Y.-K. Choi and J.-B. Yoon

Affilation: Korea Institute of Science and Technology(KIST), Korea

Pages: 45 - 48

Keywords: CNT, RF-MEMS, Inductor, Interconnects

Abstract:
In this works, we developed a top-down fabrication method to pattern and form carbon nanotube(CNT) interconnects with Cu encapsulation. Using this method, we fabricated spiral Cu-encapsulated CNT inductors for RF ICs and investigated the inductance of 0.55nH and quality(Q-) factor of 66 at 8.5GHz.

Fabrication of Cu-encapsulated Carbon Nanotube Inductors

ISBN: 1-4200-6182-8
Pages: 726
Hardcopy: $139.95