Nano Science and Technology Institute
Nanotech 2006 Vol. 3
Nanotech 2006 Vol. 3
Technical Proceedings of the 2006 NSTI Nanotechnology Conference and Trade Show, Volume 3
Chapter 7: Compact Modeling

Compact Modeling of Spiral Inductors for RF Applications

Authors:J. Chen and J.J. Liou
Affilation:University of Central Florida, US
Pages:724 - 728
Keywords:inductors, q factors, rf
Abstract:Recent growth in RF applications has increased the use of spiral inductors and thus demanded a more accurate model for such devices. In this paper, we develop a compact model for spiral inductors with symmetrical and asymmetrical terminals. Relevant and important physics such as the current crowding in metal line, coupling capacitance, frequency-dependent permittivity in oxide, and overlap parasitics are accounted for. Experimental data and results calculated from the existing inductor models are included in support of the model development.
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