Nano Science and Technology Institute
Nanotech 2006 Vol. 3
Nanotech 2006 Vol. 3
Technical Proceedings of the 2006 NSTI Nanotechnology Conference and Trade Show, Volume 3
Chapter 6: MEMS Device Modeling

Analytic Damping Model for a Square Perforation Cell

Authors:T. Veijola
Affilation:Helsinki University of Technology, FI
Pages:554 - 557
Keywords:perforation, squeeze-film, compact model, damping
Abstract:A compact model for a square perforation cell is derived. It is generated both analytically and with 3D FEM simulations of the structure. The model consists of six flow resistances, whose values are simple functions of gas parameters and dimensions. The perforation cell model is used in deriving a model for a square squeezed-film damper. Verification with full 3D FEM simulations of the damper shows that the error of the model is less than 10% for perforation ratios 1% ...80%, and less than 5% for perforation ration of 1% ... 65%.
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