Authors: J. Hernández and R. Esquivel-Sirvent
Affilation: Instituto de Fisica, UNAM, Mexico
Pages: 523 - 525
Keywords: Casimir, stability, MEMS, NEMS
The effect of the Casimir force in micro and nano electromechanical systems (MEMS/NEMS) is examined taking fully into account the dielectric properties of the materials as well as the finite thickness of movable elements in micro and nano systems. The<br>resulting equations are exact, and from the bifurcation diagrams the critical separation before jump-to-contact is determined. It is shown how the critical separation changes, for example, with the dielectric properties of the materials and how these systems can be rescaled based on the information from the bifurcation diagrams.