Nano Science and Technology Institute
Nanotech 2006 Vol. 3
Nanotech 2006 Vol. 3
Technical Proceedings of the 2006 NSTI Nanotechnology Conference and Trade Show, Volume 3
Chapter 3: MEMS, NEMS & Sensing

The Dynamic Performance of a Micro-machined Coriolis Flow Meter

Authors:C. Clark, S. Wang and R. Cheesewright
Affilation:Brunel University, UK
Pages:336 - 339
Keywords:Coriolis meter, dynamic response, simulation
The dynamic performance of micro-machined Coriolis flow meters


The performance of a prototype MEMS mass-flow meter developed by ISSYS was investigated using the Brunel University Virtual Coriolis Meter facility. The flow meter comprises a vacuum sealed vibrating flow tube and associated electronics which provide both the tube drive and processing of signals from the internal sensors. The selected device has typical (liquid) flow rates of order 0.1 mg/s and has potential applications in medicine (drug infusion) and automotive fuel injection technology. The simulation facility comprises finite element modelling of the motions of the vibrating tube with a 1-dimensional frictionless flow through it, thus allowing the generation of pseudo-data at points on the tube corresponding to the internal sensor locations. Signal processing algorithms then enable representation of an indicated meter flow-time history (output), in response to a prescribed flow input. Results have shown that the device is linear and that its sensitivity is uninfluenced by fluid density, but is very strongly dependent upon location of the internal sensors. The dynamic response time is given by the reciprocal of the drive frequency (typically 0.1 ms) for water flow, and the device step response shows noise due to signal components at the Coriolis frequency. The ramp response shows there is no significant noise induced.
The Dynamic Performance of a Micro-machined Coriolis Flow MeterView PDF of paper
Order:Mail/Fax Form
© 2017 Nano Science and Technology Institute. All Rights Reserved.
Terms of Use | Privacy Policy | Contact Us | Site Map