Sensitivity to Shape and Membrane Thickness Variations in Capacitive Pressure Sensors

	Nanotech 2006 Vol. 3 Technical Proceedings of the 2006 NSTI Nanotechnology Conference and Trade Show, Volume 3 Chapter 3: MEMS, NEMS & Sensing
	Sensitivity to Shape and Membrane Thickness Variations in Capacitive Pressure Sensors
Authors:	A. Sabet and X.J. Avula
Affilation:	Washington University in St. Louis, US
Pages:	385 - 388
Keywords:	membrane, pressure, sensor
Abstract:
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ISBN:	0-9767985-8-1
Pages:	913
Hardcopy:	$119.95

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