Nano Science and Technology Institute
Nanotech 2006 Vol. 3
Nanotech 2006 Vol. 3
Technical Proceedings of the 2006 NSTI Nanotechnology Conference and Trade Show, Volume 3
 
Chapter 3: MEMS, NEMS & Sensing
 

Sensitivity to Shape and Membrane Thickness Variations in Capacitive Pressure Sensors

Authors:A. Sabet and X.J. Avula
Affilation:Washington University in St. Louis, US
Pages:385 - 388
Keywords:membrane, pressure, sensor
Abstract:
Sensitivity to Shape and Membrane Thickness Variations in Capacitive Pressure SensorsView PDF of paper
ISBN:0-9767985-8-1
Pages:913
Hardcopy:$119.95
 
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