Nanotech 2006 Vol. 3
Nanotech 2006 Vol. 3
Technical Proceedings of the 2006 NSTI Nanotechnology Conference and Trade Show, Volume 3

MEMS, NEMS & Sensing Chapter 3

Sensitivity to Shape and Membrane Thickness Variations in Capacitive Pressure Sensors

Authors: A. Sabet and X.J. Avula

Affilation: Washington University in St. Louis, United States

Pages: 385 - 388

Keywords: membrane, pressure, sensor

Abstract:

Sensitivity to Shape and Membrane Thickness Variations in Capacitive Pressure Sensors

ISBN: 0-9767985-8-1
Pages: 913
Hardcopy: $119.95