Nano Science and Technology Institute
Nanotech 2006 Vol. 3
Nanotech 2006 Vol. 3
Technical Proceedings of the 2006 NSTI Nanotechnology Conference and Trade Show, Volume 3
 
Chapter 2: Nanoscale Fabrication
 

Real-Time Drift Correction of a Focused Ion Beam Milling System

Authors:D. Freeman, B. Luther-Davies and S. Madden
Affilation:Australian National University, AU
Pages:241 - 242
Keywords:focused ion beam, photonic crystals, nanofabrication, drift correction
Abstract:We are working towards the fabrication of large periodic optical structures known as photonic crystals. A focused ion beam (FIB) is used to mill holes, which must be smooth and repeatable, with nm positional accuracy. We are developing custom pattern generation software for this purpose.
FIB systems suffer from slow systematic drift over long milling times, and we have developed a real-time drift correction scheme which mills a series of reference marks and then periodically FIB images them to detect and compensate for the apparent motion of the specimen under the beam.
Real-Time Drift Correction of a Focused Ion Beam Milling SystemView PDF of paper
ISBN:0-9767985-8-1
Pages:913
Hardcopy:$119.95
 
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