Authors: D. Freeman, B. Luther-Davies and S. Madden
Affilation: Australian National University, Australia
Pages: 241 - 242
Keywords: focused ion beam, photonic crystals, nanofabrication, drift correction
We are working towards the fabrication of large periodic optical structures known as photonic crystals. A focused ion beam (FIB) is used to mill holes, which must be smooth and repeatable, with nm positional accuracy. We are developing custom pattern generation software for this purpose.<br>FIB systems suffer from slow systematic drift over long milling times, and we have developed a real-time drift correction scheme which mills a series of reference marks and then periodically FIB images them to detect and compensate for the apparent motion of the specimen under the beam.