Nanotech 2006 Vol. 3
Nanotech 2006 Vol. 3
Technical Proceedings of the 2006 NSTI Nanotechnology Conference and Trade Show, Volume 3

Nanoscale Fabrication Chapter 2

Real-Time Drift Correction of a Focused Ion Beam Milling System

Authors: D. Freeman, B. Luther-Davies and S. Madden

Affilation: Australian National University, Australia

Pages: 241 - 242

Keywords: focused ion beam, photonic crystals, nanofabrication, drift correction

Abstract:
We are working towards the fabrication of large periodic optical structures known as photonic crystals. A focused ion beam (FIB) is used to mill holes, which must be smooth and repeatable, with nm positional accuracy. We are developing custom pattern generation software for this purpose.<br>FIB systems suffer from slow systematic drift over long milling times, and we have developed a real-time drift correction scheme which mills a series of reference marks and then periodically FIB images them to detect and compensate for the apparent motion of the specimen under the beam.

Real-Time Drift Correction of a Focused Ion Beam Milling System

ISBN: 0-9767985-8-1
Pages: 913
Hardcopy: $119.95