Nano Science and Technology Institute
Nanotech 2006 Vol. 3
Nanotech 2006 Vol. 3
Technical Proceedings of the 2006 NSTI Nanotechnology Conference and Trade Show, Volume 3
Chapter 2: Nanoscale Fabrication

Reliability of Self-assembled Hydropobic Coatings: Chemical Resistance and Mechanical Durability

Authors:B. Kobrin, T. Zhang, M.T. Grimes, K. Chong, R. Nowak and J. Chinn
Affilation:Applied Microstructures, US
Pages:155 - 157
Keywords:MEMS, hydrophobic, self-assembled, monolayers, stability, durability, resistance
Abstract:We report on hydrophobic self-assembled monolayers (SAM) with an improved chemical and mechanical stability on both Al and Si substrates. These improvements are obtained using a relatively new molecular vapor deposition method - MVDTM, which integrates the vapor deposition process of self-assembled mono-layers with various surface preparation techniques and adhesion layers. The results of liquid immersion tests, performed with a standard set of chemicals used in biochemistry and mass spectroscopy, show excellent chemical stability. Mechanical durability is studied on FDTS (Perfluorodecyltrichlorosilane) films and compared to a perfluorinated-DLC layer deposited using conventional PECVD technology. A dry wipe test, performed on both films using an HP-990 Maintenance Blades tester, reveals improved long-term mechanical stability of the FDTS hydrophobic film under intense mechanical impact. Nano-indentation scratch tests were performed using brass and steel balls and compared with acoustic emission signal and coefficient of friction measurements to evaluate durability of the mono- and multi-layer films. We have confirmed that film durability is proportional to the number of layers in a stack.
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