Nano Science and Technology Institute
Nanotech 2006 Vol. 3
Nanotech 2006 Vol. 3
Technical Proceedings of the 2006 NSTI Nanotechnology Conference and Trade Show, Volume 3
Chapter 2: Nanoscale Fabrication

Programmable Three-Dimensional Microfluidic Fabrication by Direct-Write Assembly

Authors:E. Ghafar-Zadeh, D. Therriault and M. Sawan
Affilation:Ecole Polytechnique de Montreal, CA
Pages:292 - 295
Keywords:direct-write assebly, 3D microfluidic, fabrication, program control, optimization
Abstract:There are increasing needs for 3D microfluidic components such as microchannels, micromixers or micropumps for Laboratory-on-chip systems. To date, several efficient, but expensive and complex techniques such as Liga and micro-stereo-lithography [1] have been developed to fabricate such fluidic structures. Direct-write assembly [2]-[3] is a high efficiency, low complexity and CMOS compatible technique, and can be used to fabricate 3D microfluidics, or the integration of microfluidic, and/or microelectronic chips from different technologies. In this paper, we for the first time explain the programming concept of the direct-write assembly technique where the laborious fabrication steps are broken down to a few simple numerical algorithms. Also, we demonstrate preliminary experimental results through the fabrication of a 3D conic microreservoir. Thereafter, a methodology to optimize this experimental procedure is discussed.
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