Nanotech 2006 Vol. 3
Nanotech 2006 Vol. 3
Technical Proceedings of the 2006 NSTI Nanotechnology Conference and Trade Show, Volume 3

Nanoscale Fabrication Chapter 2

Novel PDMS stamp for imprint lithography

Authors: I.S. Maeng

Affilation: Samsung Electro-mechanics Co. Ltd., Korea

Pages: 270 - 272

Keywords: PDMS, imprinting lithography, mechanica strength, stamp

Abstract:
New PDMS/epoxy composite material which has sufficent mechanical strength is used as a stamp for the imprinting lithography. Its fabrication procedure, and the imprinting results using this stamp will be discussed.

Novel PDMS stamp for imprint lithography

ISBN: 0-9767985-8-1
Pages: 913
Hardcopy: $119.95