Authors: I.S. Maeng
Affilation: Samsung Electro-mechanics Co. Ltd., Korea
Pages: 270 - 272
Keywords: PDMS, imprinting lithography, mechanica strength, stamp
New PDMS/epoxy composite material which has sufficent mechanical strength is used as a stamp for the imprinting lithography. Its fabrication procedure, and the imprinting results using this stamp will be discussed.