Nano Science and Technology Institute
Nanotech 2006 Vol. 3
Nanotech 2006 Vol. 3
Technical Proceedings of the 2006 NSTI Nanotechnology Conference and Trade Show, Volume 3
Chapter 2: Nanoscale Fabrication

Novel PDMS stamp for imprint lithography

Authors:I.S. Maeng
Affilation:Samsung Electro-mechanics Co. Ltd., KR
Pages:270 - 272
Keywords:PDMS, imprinting lithography, mechanica strength, stamp
Abstract:New PDMS/epoxy composite material which has sufficent mechanical strength is used as a stamp for the imprinting lithography. Its fabrication procedure, and the imprinting results using this stamp will be discussed.
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