Authors: M.G. Reitsma and R.S. Gates
Affilation: National Institute of Standards and Technology, United States
Pages: 785 - 788
Keywords: atomic force microscope, cantilever, stiffness calibration
A new technique for calibrating Atomic Force Microscope (AFM) cantilevers is demonstrated using a unique array of microfabricated reference cantilevers. The array, consisting of seven uniform rectangular cantilevers of different length (and thus stiffness), was used to perform a high precision calibration on a commercial AFM cantilever. When combined with independent validation of the reference array with an SI traceable method, the technique presented here will offer an approach for high accuracy AFM cantilever calibration.