Nano Science and Technology Institute
Nanotech 2006 Vol. 1
Nanotech 2006 Vol. 1
Technical Proceedings of the 2006 NSTI Nanotechnology Conference and Trade Show, Volume 1
 
Chapter 8: Characterization
 

A New High Precision Procedure for AFM Probe Spring Constant Measurement using a Microfabricated Calibrated Reference Cantilever Array (CRCA)

Authors:M.G. Reitsma and R.S. Gates
Affilation:National Institute of Standards and Technology, US
Pages:785 - 788
Keywords:atomic force microscope, cantilever, stiffness calibration
Abstract:A new technique for calibrating Atomic Force Microscope (AFM) cantilevers is demonstrated using a unique array of microfabricated reference cantilevers. The array, consisting of seven uniform rectangular cantilevers of different length (and thus stiffness), was used to perform a high precision calibration on a commercial AFM cantilever. When combined with independent validation of the reference array with an SI traceable method, the technique presented here will offer an approach for high accuracy AFM cantilever calibration.
A New High Precision Procedure for AFM Probe Spring Constant Measurement using a Microfabricated Calibrated Reference Cantilever Array (CRCA)View PDF of paper
ISBN:0-9767985-6-5
Pages:871
Hardcopy:$119.95
 
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