Nanotech 2006 Vol. 1
Nanotech 2006 Vol. 1
Technical Proceedings of the 2006 NSTI Nanotechnology Conference and Trade Show, Volume 1

Characterization Chapter 8

Mechanical Properties Measurement of Nanowires Anisotropic Conductive Film by Nanoindentation Technique

Authors: Y-Y Hsu, R-J Lin, T-Y Kuo, Y-Y Su, R-H Uang and H-C Cheng

Affilation: Industrial Technology Research Institute, Taiwan

Pages: 781 - 784

Keywords: nanowires, nano-indentation, mechanical properties, reduced-modules

Abstract:
In this investigation, a new type of anisotropic conductive film composed by nanowires and polymer was developed. Anodic aluminum oxide (AAO) film was uses as a template to obtain cobalt nanowires by electro-deposition. Low viscous polymer were spread over and filled into the gaps of pillar-like nanowires array after surface treatment by oil-acid. And then laser ablation was used to remove the excess polymer covering the tips of nanowires. Because the nanowires have to keep well anisotropic conductive property during electronic-packaging fabrication, the materials behaviors of nanowires such as modulus, CTE, and thermo-conductivity were important for understanding reliability issues and concerns. In this investigation, namowires anisotropic conductive film was fabricated with 30um in thickness and 200nm in diameter of each nanowire. Nano-indentation technique was then performed to determine themechanical properties of film in out of plane by indenting the surface of nanowires film. The tip of nano-indentation was 300nm in diameter and measured method was force-control. The surface roughness and indented shape performed by AFM-mode were also reported in this paper. The mean value of reduced-modulus is 14.471GPa and the standard deviation is 2.578GPa. These statistical results were based on 102 data points with high consistency.

Mechanical Properties Measurement of Nanowires Anisotropic Conductive Film by Nanoindentation Technique

ISBN: 0-9767985-6-5
Pages: 871
Hardcopy: $119.95