Authors: A.H. Kean and L. Allers
Affilation: Mantis Deposition Ltd, United Kingdom
Pages: 749 - 752
Keywords: nanoparticle, accelerated, deposition
This paper describes the generation of nanoparticles of diameter 1-20nm by ‘terminated gas condensation’. The resulting nanoparticles are charged and can be mass selected by a linear quadrupole. The nanoparticles are deposited onto substrates using electrostactic acceleration. The particles can be soft landed to preserve the cluster, or accelerated to form adhesive and porous films of materials such as TiOn. The resulting depositions are anaylsed by AFM, TEM and XRD.