Nanotech 2006 Vol. 1
Nanotech 2006 Vol. 1
Technical Proceedings of the 2006 NSTI Nanotechnology Conference and Trade Show, Volume 1

Characterization Chapter 8

New reference standards and artifacts for nanoscale property characterization

Authors: J.R. Pratt, J.A. Kramar, G. Shaw, R. Gates, P. Rice and J. Moreland

Affilation: National Institute of Standards and Technology, United States

Pages: 764 - 767

Keywords: atomic force microscope, cantilever, stiffness calibration

Abstract:
This paper provides an overview of calibration artifacts being developed at NIST that will greatly aid the accurate determination of nanoscale physical properties across a broad range of applications. We focus on three proposed reference standards: a spring constant artifact for calibration of atomic force microscope cantilever stiffness, a piezoresistive force sensor for calibration of contact force in atomic force acoustic microscopy, and a torsional oscillator for the absolute measurement of thin-film magnetic moments.

New reference standards and artifacts for nanoscale property characterization

ISBN: 0-9767985-6-5
Pages: 871
Hardcopy: $119.95