Authors: J.R. Pratt, J.A. Kramar, G. Shaw, R. Gates, P. Rice and J. Moreland
Affilation: National Institute of Standards and Technology, United States
Pages: 764 - 767
Keywords: atomic force microscope, cantilever, stiffness calibration
This paper provides an overview of calibration artifacts being developed at NIST that will greatly aid the accurate determination of nanoscale physical properties across a broad range of applications. We focus on three proposed reference standards: a spring constant artifact for calibration of atomic force microscope cantilever stiffness, a piezoresistive force sensor for calibration of contact force in atomic force acoustic microscopy, and a torsional oscillator for the absolute measurement of thin-film magnetic moments.