Authors: I.V. Veryovkin, W.F. Calaway, C.E. Tripa and M.J. Pellin
Affilation: Argonne National Laboratory, United States
Pages: 733 - 736
Keywords: mass spectrometry, laser postionization, ion sputtering, laser desorption
A new time-of-flight mass spectometer of postionized secondary neutrals, SARISA, has been developed and constructed at Argonne National Laboratory. This advanced analytical instrument has uniquely high useful yield >20%, is equipped with high spatial resolution microprobes (ion, electron and laser) that are combined with low energy ion sputtering for high depth resolution. This makes the instrument capable of three-dimensional characterization of samples with nanometer dimensions.