Authors: L. Zhang, L.X. Dong, D.J. Bell, B.J. Nelson, C. Schönenberger and D. Grützmacher
Affilation: Paul Scherrer Institut, Switzerland
Pages: 42 - 45
Keywords: semiconductor nanotube, SiGe, Euler buckling
Freestanding Si/SiGe microtubes have been fabricated using the roll-up technique of strained bilayer structures. Si/SiGe bilayers of 18 nm thickness have been rolled into tubes of 1.3 μm diameter. Tubes of 60 μm length have been detached from the substrate and placed between a nanorobotic manipulaltor and an AFM tip to analyse their mechanical properties using the Euler buckling method. The tubes proved to be mechanical robust with a flexural rigidity (EI) amounting to 4.1*10-15 Nm2. The presented manipulation technique has been proven to be a suitable approach to characterize the mechanical properties of these self-scrolled semiconductor structures. The results give insights into the suitability of these structures for micromechanical devices.