Nano Science and Technology Institute
Nanotech 2005 Vol. 3
Nanotech 2005 Vol. 3
Technical Proceedings of the 2005 NSTI Nanotechnology Conference and Trade Show, Volume 3
Chapter 9: MEMS Modeling and Design

Electromechanical Model for a Single Port Nano-Mechancial Beam Resonator

Authors:T. Kemp, P.T. Docker, M.C.L. Ward and I.P. Jones
Affilation:The University of Birmingham, UK
Pages:610 - 612
Keywords:Nano-resonator, electromechanical, magnetomotive
Abstract:A simple electromechanical model for a nano-mechanical, magneto-motively driven beam resonator is derived. The model is developed in order to determine the dynamic electrical properties of the resonator. This enables the pickoff and drive electronics to be matched to the resonator performance. The model is based on a lumped parameter approach using an equivalent electrical circuit.
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