Stress Optimization of a Micromechanical Torsional Spring

	Nanotech 2005 Vol. 3 Technical Proceedings of the 2005 NSTI Nanotechnology Conference and Trade Show, Volume 3 Chapter 9: MEMS Modeling and Design
	Stress Optimization of a Micromechanical Torsional Spring
Authors:	T. Klose, D. Kunze, T. Sandner, H. Schenk, H. Lakner, A. Schneider and P. Schneider
Affilation:	Fraunhofer IPMS, DE
Pages:	602 - 605
Keywords:	MEMS, ANSYS, MOSCITO, optimization, torsional spring
Abstract:	In this paper we present a method for the design of a stress-optimized, micromechanical torsional spring, used in MEMS. Our optimization approach is based on a software tool for simulator-based optimization MOSCITO, cooperating with the FEM tool ANSYS. For a specific spring geometry we are able to increase maximally possible deflection by approximately 30 percent.
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ISBN:	0-9767985-2-2
Pages:	786
Hardcopy:	$109.95

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