Nano Science and Technology Institute
Nanotech 2005 Vol. 3
Nanotech 2005 Vol. 3
Technical Proceedings of the 2005 NSTI Nanotechnology Conference and Trade Show, Volume 3
Chapter 9: MEMS Modeling and Design

Effects of Etch Holes in Microelectromechanical Resonators

Authors:J. Yan and A.A. Seshia
Affilation:University of Cambridge, UK
Pages:577 - 580
Keywords:micromechanical resonators, etch holes, mems modeling
Abstract:Micromachining processes such as surface machining of polysilicon microstructures or SOI-based processes often require etch holes to be created in the structural layer for purposes of releasing the mechanical structures. The present work examines the effect of the nature and density of etch holes on the resonant frequency of micromechanical resonators. Micromechanical resonators find applications as electronic filters or as timing references in oscillators and any process-induced offset in resonant frequency can significantly affect system performance. A general analytical formulation based on the Rayleigh-Ritz principle is used as a starting point to model the resonant frequencies for microstructures of a given topology. The analytical approach is compared to finite element simulation results for a multitude of resonator topologies for varying etch hole size and location. This analytical model enables the formulation of design rules that allow minimization of resonant frequency offsets in MEMS resonators due to the presence of etch holes.
Effects of Etch Holes in Microelectromechanical ResonatorsView PDF of paper
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