Design, Modelling and Optimisation of Integrated Piezoelectric Micro Power Generators

	Nanotech 2005 Vol. 3 Technical Proceedings of the 2005 NSTI Nanotechnology Conference and Trade Show, Volume 3 Chapter 9: MEMS Modeling and Design
	Design, Modelling and Optimisation of Integrated Piezoelectric Micro Power Generators
Authors:	M. Marzencki, S. Basrour and B. Charlot
Affilation:	TIMA, FR
Pages:	545 - 548
Keywords:	micro power generators, piezoelectric conversion
Abstract:	This paper presents a mechanical vibration energy scavenging solution for micro power generation. The transduction is performed using a novel resonant cantilever beam SOI structure with a piezoelectric film. Simulation and optimization of such a device fabricated using a specific MEMS process and with piezoelectric thin film is detailed. The simulation results will be compared with experimental data obtained using devices currently under fabrication.
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ISBN:	0-9767985-2-2
Pages:	786
Hardcopy:	$109.95

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