Nanotech 2005 Vol. 3
Nanotech 2005 Vol. 3
Technical Proceedings of the 2005 NSTI Nanotechnology Conference and Trade Show, Volume 3

MEMS Modeling and Design Chapter 9

Design, Modelling and Optimisation of Integrated Piezoelectric Micro Power Generators

Authors: M. Marzencki, S. Basrour and B. Charlot

Affilation: TIMA, France

Pages: 545 - 548

Keywords: micro power generators, piezoelectric conversion

Abstract:
This paper presents a mechanical vibration energy scavenging solution for micro power generation. The transduction is performed using a novel resonant cantilever beam SOI structure with a piezoelectric film. Simulation and optimization of such a device fabricated using a specific MEMS process and with piezoelectric thin film is detailed. The simulation results will be compared with experimental data obtained using devices currently under fabrication.

Design, Modelling and Optimisation of Integrated Piezoelectric Micro Power Generators

ISBN: 0-9767985-2-2
Pages: 786
Hardcopy: $109.95