Nano Science and Technology Institute
Nanotech 2005 Vol. 3
Nanotech 2005 Vol. 3
Technical Proceedings of the 2005 NSTI Nanotechnology Conference and Trade Show, Volume 3
 
Chapter 9: MEMS Modeling and Design
 

Design, Modelling and Optimisation of Integrated Piezoelectric Micro Power Generators

Authors:M. Marzencki, S. Basrour and B. Charlot
Affilation:TIMA, FR
Pages:545 - 548
Keywords:micro power generators, piezoelectric conversion
Abstract:This paper presents a mechanical vibration energy scavenging solution for micro power generation. The transduction is performed using a novel resonant cantilever beam SOI structure with a piezoelectric film. Simulation and optimization of such a device fabricated using a specific MEMS process and with piezoelectric thin film is detailed. The simulation results will be compared with experimental data obtained using devices currently under fabrication.
Design, Modelling and Optimisation of Integrated Piezoelectric Micro Power GeneratorsView PDF of paper
ISBN:0-9767985-2-2
Pages:786
Hardcopy:$109.95
 
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