Nano Science and Technology Institute
Nanotech 2005 Vol. 3
Nanotech 2005 Vol. 3
Technical Proceedings of the 2005 NSTI Nanotechnology Conference and Trade Show, Volume 3
Chapter 9: MEMS Modeling and Design

T-CAD Environment for Multi-Material-MEMS Design

Authors:U. Triltsch, S. BĆ¼ttgenbach, D. Straube and H.-J. Franke
Affilation:Technical University of Braunschweig, DE
Pages:541 - 544
Keywords:T-CAD, building blocks, integrated process design
Abstract:The presented approach delivers a design tool for multi-material MEMS and can act as a system level tool with interfaces for component level analysis tools. The platform provides interfaces to different knowledge bases which either can act as source of information or as editing tools for database maintenance. The main advantage of the system is a built-in setup of a consistent process flow. Together with the reuse of ready made building blocks this leads to a decrease in development time and costs.
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