Papers:
Performance Tradeoffs in MEMS Sensors with High-Finesse Fabry-Perot Interferometry Detection
A detailed analysis with experimental verification is presented for optical MEMS sensors based on Fabry-Perot interferometers (FPI). These sensors consist of two partially transparent parallel plates with reflective inner surfaces, forming a cavity with an [...]
A Coarse-Grained Tight Binding Method for Electrostatic Analysis of Nanoelectromechanical Systems (NEMS)
Silicon electrostatic nanoelectromechanical systems (NEMS) are one of the emerging applications in nanotechnology. As the critical length of a NEM structure shrinks to less than a few nanometers, classical models based on continuum approximations become [...]
T-CAD Environment for Multi-Material-MEMS Design
The presented approach delivers a design tool for multi-material MEMS and can act as a system level tool with interfaces for component level analysis tools. The platform provides interfaces to different knowledge bases which either [...]
Design, Modelling and Optimisation of Integrated Piezoelectric Micro Power Generators
This paper presents a mechanical vibration energy scavenging solution for micro power generation. The transduction is performed using a novel resonant cantilever beam SOI structure with a piezoelectric film. Simulation and optimization of such a [...]
A Robust Approach for Estimating Diffusion Constants from Concentration Data in Microchannel Mixers
In this paper we present a robust and geometry independent method for the estimation of diffusion coeffients of solutes from image data. Our diffusion coefficient estimation algorithm works in two steps. First, given the device [...]
Electromechanical Modeling of MEMS Resonators with MOSFET Detection
Abelé N., Pott V., Boucart K., Casset F., Séguéni K., Ancey P., Ionescu A.M., Swiss Federal Institute of Technology of Lausanne, CH
This work reports on analytical modeling and investigation of Resonant Suspended-Gate MOSFETs (RSG-MOSFET) as future solutions for RF applications including MEMS and ICs. Pure metal-metal capacitive detection for resonators is shown to be the most [...]
Elastomeric Composites to Reduce the Effects of Trunnion Mode in Inertial Devices
Composites have long been known for their ability to combine the properties of dissimilar materials to create properties ideally tailored for an application. We propose applying these features to MEMS in order to reduce the [...]
A Method for Solving Arbitrary MEMS Perforation Problems with Edge and Rare Gas Effects
We present an accurate and fast method solving arbitrary perforation problems utilizing a solver for an extended modified Reynolds equation, the Local Impedance Reynolds (LIR) solver. The extension includes an additional term in the Reynolds [...]
Computer Aided Design and Optimization of Integrated Circuits with RF MEMS Devices by an ANN Based Macro-Modeling Approach
Computer Aided Design of RF MEMS enables a reliable, cost effective and time saving alternative to the experiment guided development process. Full-wave analysis techniques including the finite element method and finite difference time domain have [...]
Three Degrees of Freedom Thermal Microactuator
Pasupuleti A., Sahin F., Walter W.W., Raisanen A., Hebding J.L., Hirschman K.D., Rochester Institute of Technology, US
This research is focused on the design and fabrication of a three-degrees-of-freedom (DOF) polyimide-based thermal microactuator. The proposed actuator can have displacements simultaneously in the X, Y and Z axes. The operation of the microactuator [...]
Computational Modeling of a Piezoelectrically Actuated Microvalve for the Control of Liquid Flowrate
Computational modeling of liquid flow in a piezoelectrically actuated microvalve is discussed. A 3-D structured mesh with 330,000 hexahedral cells that represents the major features of the microvalve was generated for the numerical model. Due [...]
Effects of Etch Holes in Microelectromechanical Resonators
Micromachining processes such as surface machining of polysilicon microstructures or SOI-based processes often require etch holes to be created in the structural layer for purposes of releasing the mechanical structures. The present work examines the [...]
Electro-Static Membrane Model in CAD
The model simplification is one of the most important problems in its design process. Every so often this approach tends to the physical phenomena violation, exceeding assumed domains or published models (and commercial software) application [...]
Symbolic Finite Element Analysis for Parametric Studies
In our paper, we will present a method of performing finite element analysis using a symbolic kernel. The representation of numbers used in analysis is symbolic expressions instead of floating point numbers. Unlike standard finite [...]
Extraction of Damping Coefficients of Comb Drive by Partitioning
Accurate prediction of the dynamic behavior of comb-driven MEMS device is important to optimize the structure design. Viscous damping in the surrounding air determines the dynamic response of movable structures close to resonance. Viscose damping [...]
Modeling of an Electroactive Polyimide Ultrasonic Wave Sensor for Aerospace Applications
We have modeled a new, low cost polyimide Capacitive Micromachined Ultrasonic Transducer (CMUT) device constructed using a polyimide membrane. This paper presents the preliminary results of the electromechanical modeling of this new device. Polyimide was [...]
Numerical Investigation of Phase-Changing Heat Transfer for Laser-Assisted Direct Nano Imprint Processing
Laser-Assisted Direct Imprinting (LADI), a novel and promising technique, has been proposed since 2002 to utilize an excimer laser to irradiate and heat the silicon surface through a highly-transparent quartz mold preloaded onto the silicon. [...]
Stress Optimization of a Micromechanical Torsional Spring
Klose T., Kunze D., Sandner T., Schenk H., Lakner H., Schneider A., Schneider P., Schneider A., Schneider P., Fraunhofer IPMS, DE
In this paper we present a method for the design of a stress-optimized, micromechanical torsional spring, used in MEMS. Our optimization approach is based on a software tool for simulator-based optimization MOSCITO, cooperating with the [...]
Optimization of GaAs MEMS structures for Microwave Power Sensor
This work discusses the thermo mechanical simulations performed with the aim to optimise the temperature distribution of the Microwave Power Sensor (MPS) microsystem keeping the thermal stress as low as possible. The concept of the [...]
Electromechanical Model for a Single Port Nano-Mechancial Beam Resonator
A simple electromechanical model for a nano-mechanical, magneto-motively driven beam resonator is derived. The model is developed in order to determine the dynamic electrical properties of the resonator. This enables the pickoff and drive electronics [...]
Design of Experiment Tools for Process and Device Development
The functionality of Micro and Nano Technologies (MNT) device is mainly defined by its shape; for instance a membrane sensitivity to pressure depends on its size and thickness. An MNT device therefore needs a multi [...]
Combination of Analytical Models and Order Reduction Methods for System Level Modeling of Gyroscopes
Schneider P., Reitz S., Bastian J., Schwarz P., Döring C., Maute M., Neul R., Fraunhofer Institute for Integrated Circuits, DE
Within complex sensor systems different physical effects and electronics for signal processing have to be considered in the design process. In this paper we describe an approach for system level simulation of sensor systems and [...]
Three-Dimensional Transient Electro-Thermal Interconnect Simulation for Stress and Electromigration Analysis
Holzer S., Hollauer Ch., Ceric H., Wagner S., Entner R., Langer E., Grasser T., Selberherr S., Vienna University of Technology, AT
We introduce the combination of three-dimensional transient electro-thermal interconnect simulations for intrinsic thermo-mechanical stress problems. In order to study the development of thermal stresses we use a finite element simulator for the investigation on stresses [...]
MEMS Pressure Sensor with Two Thin Film Piezoelectric Read-Out
MEMS accelerometers using piezoelectric lead zirconate titanate (PZT) thin films as read-out have been attracting a great deal of attention due to their simple structures and high sensitivity. This paper proposes a model of micro [...]
Journal: TechConnect Briefs
Volume: 3, Technical Proceedings of the 2005 NSTI Nanotechnology Conference and Trade Show, Volume 3
Published: May 8, 2005
Industry sector: Sensors, MEMS, Electronics
Topic: MEMS & NEMS Devices, Modeling & Applications
ISBN: 0-9767985-2-2