Nano Science and Technology Institute
Nanotech 2005 Vol. 3
Nanotech 2005 Vol. 3
Technical Proceedings of the 2005 NSTI Nanotechnology Conference and Trade Show, Volume 3
Chapter 8: MEMS/NEMS Design and Applications

Towards Nano Mechanical Sensors

Authors:C. Hierold
Affilation:ETH Z├╝rich, CH
Pages:467 - 470
Keywords:microsystem, MEMS, nanosystem, carbon nano tube, sensor
Abstract:This paper is about the impact of scaling on the system performance of mechanical inertia sensors and first activities towards nano mechanical sensors. Permanent cost pressure will result in continuous efforts to integrate more functions into further miniaturized systems. As a consequence microsystems (MEMS) may also incorporate functional nano devices such as carbon nanotubes in the future. Therefore an overview of recent activities for the application of carbon nanotubes with a focus on mechanical sensors is provided.
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