Nano Science and Technology Institute
Nanotech 2005 Vol. 3
Nanotech 2005 Vol. 3
Technical Proceedings of the 2005 NSTI Nanotechnology Conference and Trade Show, Volume 3
 
Chapter 8: MEMS/NEMS Design and Applications
 

Higher Order Sigma-Delta Modulator Interfaces for MEMS Capacitive Sensors

Authors:M. Kraft and Y. Dong
Affilation:Southampton University, UK
Pages:459 - 462
Keywords:MEMS Interface, sigma-delta modulator, closed loop, capcitive, sensor
Abstract:Using higher order sigma-delta modulator topologies, similar to the ones used for electronic A/D converters, and applying them to micromachined capacitive sensors is a promising approach to increase the performance of these sesnors. The paper presents simulation and measurement results of different architectures applied to a bulk-micromachined accelerometer.
Higher Order Sigma-Delta Modulator Interfaces for MEMS Capacitive SensorsView PDF of paper
ISBN:0-9767985-2-2
Pages:786
Hardcopy:$109.95
 
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