Authors: M. Kraft and Y. Dong
Affilation: Southampton University, United Kingdom
Pages: 459 - 462
Keywords: MEMS Interface, sigma-delta modulator, closed loop, capcitive, sensor
Using higher order sigma-delta modulator topologies, similar to the ones used for electronic A/D converters, and applying them to micromachined capacitive sensors is a promising approach to increase the performance of these sesnors. The paper presents simulation and measurement results of different architectures applied to a bulk-micromachined accelerometer.