Higher Order Sigma-Delta Modulator Interfaces for MEMS Capacitive Sensors

	Nanotech 2005 Vol. 3 Technical Proceedings of the 2005 NSTI Nanotechnology Conference and Trade Show, Volume 3 Chapter 8: MEMS/NEMS Design and Applications
	Higher Order Sigma-Delta Modulator Interfaces for MEMS Capacitive Sensors
Authors:	M. Kraft and Y. Dong
Affilation:	Southampton University, UK
Pages:	459 - 462
Keywords:	MEMS Interface, sigma-delta modulator, closed loop, capcitive, sensor
Abstract:	Using higher order sigma-delta modulator topologies, similar to the ones used for electronic A/D converters, and applying them to micromachined capacitive sensors is a promising approach to increase the performance of these sesnors. The paper presents simulation and measurement results of different architectures applied to a bulk-micromachined accelerometer.
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ISBN:	0-9767985-2-2
Pages:	786
Hardcopy:	$109.95

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