Nano Science and Technology Institute
Nanotech 2005 Vol. 3
Nanotech 2005 Vol. 3
Technical Proceedings of the 2005 NSTI Nanotechnology Conference and Trade Show, Volume 3
Chapter 8: MEMS/NEMS Design and Applications

Automated and Integrated Mask Genertion from a CAD Constructed 3D Model

Authors:R.L. Schiek and R.C. Schmidt
Affilation:Sandia National Laboratories, US
Pages:443 - 446
Keywords:surface micromachining CAD tool, CAD tools
Abstract:We have developed and implemented a method which when given a three-dimensional object can infer from the object's topology the two-dimensional masks needed to produce that object with surface micromachining. The masks produced by this design tool can be generic, process independent masks, or if given process constraints, specific for a target process. This allows for 3D designs to be carried across multiple production processes and allows the designer to create their model within the design environment of their choice. This method has been validated against a set of real, multi-layer MEMS devices with complexities of over 80, 000 vertices and 5 structural layers.
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