Nano Science and Technology Institute
Nanotech 2005 Vol. 3
Nanotech 2005 Vol. 3
Technical Proceedings of the 2005 NSTI Nanotechnology Conference and Trade Show, Volume 3
Chapter 7: Smart Sensors and Systems

Modeling of a New Acceleration Sensor as part of a 2D Sensor Array in VHDL-AMS

Authors:E. Markert, M. Schlegel, M. Dienel, G. Herrmann and D. Müller
Affilation:Chemnitz University of Technology, DE
Pages:399 - 402
Keywords:rotational acceleration sensor, analytic equations, modelling
Abstract:In this paper we present an approach for modeling and simulation of a new acceleration sensor using VHDL-AMS. The sensor consists of four capacitive segments and one mass segment, aligned in a semicircle. Each capacitive segment includes static and movable combs. Any acceleration causes a rotation and displacement of the seismic mass coupled to moveable combs. The capacity alters with these movements which is measurable. Modeling of the sensor is achieved by using analytic equations for capacity changes, currents and torques. Beside rotational movements also displacements in x- and y-direction are considered for capacity calculation. Two coordinate systems are used, one static system for the environment and one rotatable system for the sensor structure.
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